Absolute pressure and gas species identification with an...

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures 2020 / 03 Vol. 38; Iss. 2

Absolute pressure and gas species identification with an optically levitated rotor

Blakemore, Charles P., Martin, Denzal, Fieguth, Alexander, Kawasaki, Akio, Priel, Nadav, Rider, Alexander D., Gratta, Giorgio
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Volume:
38
Language:
english
Journal:
Journal of Vacuum Science & Technology B
DOI:
10.1116/1.5139638
Date:
March, 2020
File:
PDF, 1.81 MB
english, 2020
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