Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
2020 / 03 Vol. 38; Iss. 2
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Absolute pressure and gas species identification with an optically levitated rotor
Blakemore, Charles P., Martin, Denzal, Fieguth, Alexander, Kawasaki, Akio, Priel, Nadav, Rider, Alexander D., Gratta, GiorgioVolume:
38
Language:
english
Journal:
Journal of Vacuum Science & Technology B
DOI:
10.1116/1.5139638
Date:
March, 2020
File:
PDF, 1.81 MB
english, 2020