Chemical Mechanical Planarization of Carbon-Doped Amorphous...

ECS Journal of Solid State Science and Technology 2020 / 01 Vol. 9; Iss. 2

Chemical Mechanical Planarization of Carbon-Doped Amorphous Ge 2 Sb 2 Te 5 Film with Hydrogen Peroxide as Oxidizer in Alkaline Slurry

Feng, Daohuan, Liu, Weili, Liu, Yuxiang, Song, Zhitang, Wang, Weilei, Wei, Zhen, Zhao, Gaoyang
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Volume:
9
Language:
english
Journal:
ECS Journal of Solid State Science and Technology
DOI:
10.1149/2162-8777/ab682d
Date:
January, 2020
File:
PDF, 949 KB
english, 2020
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