In-situ study of platinum reaction with oxygen contaminated...

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 2020 / 03 Vol. 467

In-situ study of platinum reaction with oxygen contaminated silicon layer

Khumalo, Z.M., Topić, M., Blumenthal, M., Mtshali, C.B., Madito, M.J., Mongwaketsi, N., Cloete, K., Nkosi, M.
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Volume:
467
Language:
english
Journal:
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
DOI:
10.1016/j.nimb.2020.02.001
Date:
March, 2020
File:
PDF, 2.34 MB
english, 2020
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