A 350°C piezoresistive n-type 4H-SiC pressure sensor for hydraulic and pneumatic pressure tests
FANG, XUDONG, Wu, Chen, Zhao, Yulong, Jiang, Zhuangde, Rong, Weibin, Feng, Zhihong, Lv, YuanjieLanguage:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/1361-6439/ab7785
Date:
February, 2020
File:
PDF, 687 KB
english, 2020