High Dynamic Range AFM Cantilever With a Collocated...

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Journal of Microelectromechanical Systems 2020

High Dynamic Range AFM Cantilever With a Collocated Piezoelectric Actuator-Sensor Pair

Mahdavi, Mohammad, Coskun, M. Bulut, Moheimani, S. O. Reza
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Year:
2020
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/JMEMS.2020.2967794
File:
PDF, 1.64 MB
english, 2020
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