[IEEE 2019 IEEE SENSORS - Montreal, QC, Canada (2019.10.27-2019.10.30)] 2019 IEEE SENSORS - Micro Pressure Sensors Based on Ultra-thin Amorphous Carbon Film as both Sensitive and Structural Components
Tong, Xiaoshan, Zhao, Yulong, Ma, Xin, Guo, Peng, Zhang, Qi, Liu, Mingjie, Zhang, Dongliang, Wang, AiyingYear:
2019
Language:
english
DOI:
10.1109/SENSORS43011.2019.8956612
File:
PDF, 1.36 MB
english, 2019