[IEEE 2018 22nd International Conference on Ion Implantation Technology (IIT) - Würzburg, Germany (2018.9.16-2018.9.21)] 2018 22nd International Conference on Ion Implantation Technology (IIT) - Measurement of the Lateral Charge Distribution in Silicon Generated by High-Energy Ion Incidence
Abo, Satoshi, Tani, Kenichi, Wakaya, Fujio, Onoda, Shinobu, Miyato, Yuji, Yamashita, Hayato, Abe, MasayukiYear:
2018
Language:
english
DOI:
10.1109/iit.2018.8807893
File:
PDF, 3.16 MB
english, 2018