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[IEEE 2018 22nd International Conference on Ion Implantation Technology (IIT) - Würzburg, Germany (2018.9.16-2018.9.21)] 2018 22nd International Conference on Ion Implantation Technology (IIT) - Mass Separation Issues for the Implantation of Doubly Charged Aluminum Ions
Haublein, Volker, Bauer, Anton J., Ryssel, Heiner, Frey, LotharYear:
2018
Language:
english
DOI:
10.1109/iit.2018.8807903
File:
PDF, 6.14 MB
english, 2018