[IEEE 2018 22nd International Conference on Ion Implantation Technology (IIT) - Würzburg, Germany (2018.9.16-2018.9.21)] 2018 22nd International Conference on Ion Implantation Technology (IIT) - Optimum Conditions on Support Gases for Producing Fullerene Ions and Purifying on Electron Cyclotron Resonance Ion Source
Onishi, Koji, Hamada, Kouta, Takeda, Tatsuto, Omori, Takayuki, Okumura, Kazuki, Kato, Yushi, Uchida, Takashi, Muramatsu, Masayuki, Kitagawa, Atsushi, Yoshida, YoshikazuYear:
2018
Language:
english
DOI:
10.1109/iit.2018.8807905
File:
PDF, 1.09 MB
english, 2018