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[IEEE 2018 22nd International Conference on Ion Implantation Technology (IIT) - Würzburg, Germany (2018.9.16-2018.9.21)] 2018 22nd International Conference on Ion Implantation Technology (IIT) - Platinum in Silicon after Post-Implantation Annealing: From Experiments to Process and Device Simulations
Hauf, Moritz, Schmidt, Gerhard, Niedernostheide, Franz-Josef, Johnsson, Anna, Pichler, PeterYear:
2018
Language:
english
DOI:
10.1109/iit.2018.8807936
File:
PDF, 2.63 MB
english, 2018