[IEEE 2018 22nd International Conference on Ion Implantation Technology (IIT) - Würzburg, Germany (2018.9.16-2018.9.21)] 2018 22nd International Conference on Ion Implantation Technology (IIT) - Enhancement of Beam Intensity in Electron Cyclotron Resonance Plasma by DC Biased Plate-Tuner
Hamada, Kouta, Onishi, Koji, Takeda, Tatsuto, Omori, Takayuki, Okumura, Kazuki, Kato, YushiYear:
2018
Language:
english
DOI:
10.1109/iit.2018.8807942
File:
PDF, 984 KB
english, 2018