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[IEEE 2018 22nd International Conference on Ion Implantation Technology (IIT) - Würzburg, Germany (2018.9.16-2018.9.21)] 2018 22nd International Conference on Ion Implantation Technology (IIT) - Optimization of the Ion Source Parameters to Change the Proportion of Single and Molecular Ions in Plasma
Kawamura, Masamitsu, Yamamoto, Tetusro, Kuwata, Yusuke, Sakai, Shigeki, Hamamoto, NariakiYear:
2018
Language:
english
DOI:
10.1109/iit.2018.8807948
File:
PDF, 10.09 MB
english, 2018