[IEEE 2018 22nd International Conference on Ion Implantation Technology (IIT) - Würzburg, Germany (2018.9.16-2018.9.21)] 2018 22nd International Conference on Ion Implantation Technology (IIT) - Photomodulated Reflectance Measurement Technique for Implantation Tilt Angle Monitoring
Kun, Adam, Szivos, Janos, Kis, Eniko, Rubin, Leonard M., Szarvas, Tamas, Pongracz, Anita, Almasi, Orsolya, Byrnes, John, Nadudvari, Gyorgy, Spindler, Szabolcs, Piros, Reka, Ujhelyi, FerencYear:
2018
Language:
english
DOI:
10.1109/iit.2018.8807949
File:
PDF, 4.66 MB
english, 2018