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[IEEE 2018 22nd International Conference on Ion Implantation Technology (IIT) - Würzburg, Germany (2018.9.16-2018.9.21)] 2018 22nd International Conference on Ion Implantation Technology (IIT) - Comparative Study of 4H-SiC UV-Sensors with Ion Implanted and Epitaxially Grown p-Emitter
Matthus, Christian D., Erlbacher, Tobias, Bauer, Anton J., Frey, LotharYear:
2018
Language:
english
DOI:
10.1109/iit.2018.8807950
File:
PDF, 2.04 MB
english, 2018