[IEEE 2018 22nd International Conference on Ion Implantation Technology (IIT) - Würzburg, Germany (2018.9.16-2018.9.21)] 2018 22nd International Conference on Ion Implantation Technology (IIT) - Ultralow Energy, Elevated Temperature Implants of High Doses of Helium into Silicon
Haynes, Katherine, Hu, Xunxiang, Wirth, Brian D., Hatem, Christopher, Jones, Kevin S.Year:
2018
Language:
english
DOI:
10.1109/iit.2018.8807968
File:
PDF, 2.99 MB
english, 2018