Understanding the Significance of Local Variability in Defect-Aware Process Windows
Maslow, Mark John, Yaegashi, Hidetami, Frommhold, Andreas, Hara, Arisa, Cerbu, DorinVolume:
33
Language:
english
Journal:
IEEE Transactions on Semiconductor Manufacturing
DOI:
10.1109/tsm.2019.2960090
Date:
February, 2020
File:
PDF, 4.43 MB
english, 2020