Ion-Beam and X-Ray Methods of Elemental Diagnostics of Thin Film Coatings
Egorov, V. K., Egorov, E. V., Afanasâev, M. S.Volume:
61
Language:
english
Journal:
Physics of the Solid State
DOI:
10.1134/S1063783419120114
Date:
December, 2019
File:
PDF, 665 KB
english, 2019