Characterization of aluminum oxide thin films obtained by...

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Applied Surface Science 2020 / 2

Characterization of aluminum oxide thin films obtained by chemical solution deposition and annealing for metal–insulator–metal dielectric capacitor applications

Suárez-Campos, G., Cabrera-German, D., Castelo-González, A.O., Avila-Avendano, C., Fuentes Ríos, J.L., Quevedo-López, M.A., Aceves, R., Hu, H., Sotelo-Lerma, M.
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Journal:
Applied Surface Science
DOI:
10.1016/j.apsusc.2020.145879
Date:
February, 2020
File:
PDF, 1.89 MB
2020
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