[IEEE 2019 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO) - Zhenjiang, China (2019.8.4-2019.8.8)] 2019 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO) - PZT Based Multilayer Surface Acoustic Wave Device for High Frequency Applications

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