[IEEE 2019 IEEE SENSORS - Montreal, QC, Canada (2019.10.27-2019.10.30)] 2019 IEEE SENSORS - Vibration Mode of MEMS Ultrasonic Sensors on Buckled Diaphragms with Piezoelectric Resonance Frequency Modification
Yamashita, Kaoru, Hibino, Hikaru, Nishioka, Tomoki, Noda, Minoru, Muralt, PaulYear:
2019
DOI:
10.1109/SENSORS43011.2019.8956622
File:
PDF, 757 KB
2019