[IEEE 2019 IEEE SENSORS - Montreal, QC, Canada (2019.10.27-2019.10.30)] 2019 IEEE SENSORS - Vacuum-assisted selective adhesive imprinting for heterogeneous system integration of MOEMS devices : Automated assembly of miniaturized PM sensor
Pribosek, Jaka, Zauner, Markus, Bardong, Jochen, Binder, Alfred, Maierhofer, Paul, Bergmann, Alexander, Rohrer, GeorgYear:
2019
DOI:
10.1109/SENSORS43011.2019.8956807
File:
PDF, 3.18 MB
2019