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Impurity Effects on Nucleation and Growth of SiC Clusters and Layers on Si(100) and Si(111)
Pezoldt, J., Lubov, M. N., Kharlamov, V. S.Volume:
61
Journal:
Physics of the Solid State
DOI:
10.1134/S1063783419120382
Date:
December, 2019
File:
PDF, 547 KB
2019