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Droplet Evaporation and Watermark Formation on Si Wafers with Various Films
YANO, Ayako, AMAGAI, Kenji, MATSUMOTO, Kazuki, HIYAMA, Hirokuni, FUKUNAGA, Akira, SHIMA, Shohei, HANDA, NaoyukiVolume:
86
Journal:
Journal of the Japan Society for Precision Engineering
DOI:
10.2493/jjspe.86.65
Date:
January, 2020
File:
PDF, 2.05 MB
2020