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Single-phase high-quality semipolar (10â13) AlN epilayers on m-plane (10â10) sapphire substrates
Shen, Xu-Qiang, Kojima, Kazutoshi, Okumura, HajimeVolume:
13
Journal:
Applied Physics Express
DOI:
10.35848/1882-0786/ab7486
Date:
March, 2020
File:
PDF, 669 KB
2020