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Applied Surface Science 2020 / 2

3D structure evolution using metastable atomic layer deposition based on planar silver templates

Ziegler, Mario, Thamm, Sophie, Stolle, H. Lisa K.S., Dellith, J., Hübner, Uwe, Wang, Dong, Schaaf, Peter
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Language:
english
Journal:
Applied Surface Science
DOI:
10.1016/j.apsusc.2020.145770
Date:
February, 2020
File:
PDF, 2.34 MB
english, 2020
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