Low-Power Dual Mode MEMS Resonators With PPB Stability Over Temperature
Ortiz, Lizmarie Comenencia, Kwon, Hyun-Keun, Rodriguez, Janna, Chen, Yunhan, Vukasin, Gabrielle D., Heinz, David B., Shin, Dongsuk D., Kenny, Thomas W.Year:
2020
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/JMEMS.2020.2970609
File:
PDF, 9.53 MB
english, 2020