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Effect of Solid-State Epitaxial Recrystallization on Defect Density in Ultrathin Silicon-on-Sapphire Layers
Fedotov, S. D., Statsenko, V. N., Egorov, N. N., Golubkov, S. A.Volume:
61
Language:
english
Journal:
Physics of the Solid State
DOI:
10.1134/S1063783419120126
Date:
December, 2019
File:
PDF, 1.21 MB
english, 2019