Hydrolysis and Condensation of n...

Inorganic Chemistry 2020 / 02

Hydrolysis and Condensation of n -BuSnCl 3 : Enabling Deposition of Smooth Metal Oxide Photoresist Thin Films

Kenane, Nizan, Grove, Markas A., Perkins, Cory K., Reynolds, Tristan R., Cheong, Paul Ha-Yeon, Keszler, Douglas A.
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Language:
english
Journal:
Inorganic Chemistry
DOI:
10.1021/acs.inorgchem.9b03589
Date:
February, 2020
File:
PDF, 2.26 MB
english, 2020
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