The effect of chlorine addition on ferromagnetic enhanced...

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Japanese Journal of Applied Physics 2019 / 12

The effect of chlorine addition on ferromagnetic enhanced inductively coupled plasma

Fedoseev, Alexander, Isupov, Mikhail, Sukhinin, Gennadiy, Pinaev, Vadim, Demin, Nikon, Salnikov, Mikhail
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Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.7567/1347-4065/ab6568
Date:
December, 2019
File:
PDF, 943 KB
english, 2019
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