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Relationship Between Basal Plane Dislocation Distribution and Local Basal Plane Bending in PVT-Grown 4H-SiC Crystals
Ailihumaer, Tuerxun, Peng, Hongyu, Raghothamachar, Balaji, Dudley, Michael, Chung, Gilyong, Manning, Ian, Sanchez, EdwardLanguage:
english
Journal:
Journal of Electronic Materials
DOI:
10.1007/s11664-019-07937-6
Date:
January, 2020
File:
PDF, 2.24 MB
english, 2020