Effect of high temperature annealing on resistivity and...

Thin Solid Films 2020 / 03 Vol. 698

Effect of high temperature annealing on resistivity and temperature coefficient of resistance of sputtered platinum thin films of SiO2/Pt/SiOx interfaces

Schössler, Timo, Schön, Florian, Lemier, Christian, Urban, Gerald
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Volume:
698
Language:
english
Journal:
Thin Solid Films
DOI:
10.1016/j.tsf.2020.137877
Date:
March, 2020
File:
PDF, 1.47 MB
english, 2020
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