Study of the Composition of Impurities in High-Purity...

Inorganic Materials 2019 / 12 Vol. 55; Iss. 14

Study of the Composition of Impurities in High-Purity Monosilane Obtained from Magnesium Silicide Using the Method of Chromatography–Mass Spectrometry

Sozin, A. Yu., Kotkov, A. P., Grishnova, N. D., Anoshin, O. S., Skosyrev, A. I., Arhiptsev, D. F., Chernova, O. Yu., Sorochkina, T. G.
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Volume:
55
Journal:
Inorganic Materials
DOI:
10.1134/S0020168519140139
Date:
December, 2019
File:
PDF, 511 KB
2019
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