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Sensors and Actuators A: Physical 2020 / 2

Fabrication Method of Micromachined Quartz Glass Resonator Using Sacrificial Supporting Structures

Khan, Muhammad Jehanzeb, Tsukamoto, Takashiro, Al Farisi, Muhammad Salman, Tanaka, Shuji
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Journal:
Sensors and Actuators A: Physical
DOI:
10.1016/j.sna.2020.111922
Date:
February, 2020
File:
PDF, 6.30 MB
2020
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