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Flat cutoff probe for real-time electron density measurement in industrial plasma processing
Yeom, Hee Jung, Kim, Jung-Hyung, Choi, Daehan, Choi, Eun Seok, Yoon, Min Young, Seong, Dae-Jin, You, Shin Jae, Hyo-Chang, LeeJournal:
Plasma Sources Science and Technology
DOI:
10.1088/1361-6595/ab62d9
Date:
December, 2019
File:
PDF, 1.13 MB
2019