Physical processes in capillary- porous material and...

Journal of Physics Conference Series 2019 / 10 Vol. 1328

Physical processes in capillary- porous material and coating in HF plasma at decreased pressure

Rakhmatullina, G R, Nizamova, D K, Pankova, E A, Yu Ryazantseva, E, Akhverdiev, R F, Tikhonova, V P, Shaekhov, M F
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Volume:
1328
Journal:
Journal of Physics: Conference Series
DOI:
10.1088/1742-6596/1328/1/012065
Date:
October, 2019
File:
PDF, 436 KB
2019
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