Non-destructive chemical and phase layer profiling of...

Journal of Physics Conference Series 2019 / 11 Vol. 1370

Non-destructive chemical and phase layer profiling of multicomponent multilayer thin ultrathin films

Lubenchenko, A V, Ivanov, D A, Lubenchenko, O I, Yachuk, V A, Pavlov, O N, Lashkov, I A, Lukyantsev, D S
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Volume:
1370
Journal:
Journal of Physics: Conference Series
DOI:
10.1088/1742-6596/1370/1/012048
Date:
November, 2019
File:
PDF, 842 KB
2019
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