Temperature gradients in targets with high-intensity implantation and their influence on the characteristics of ion-modified layers
Ryabchikov, A I, Lopatin, I V, Ananin, P S, Bleicher, G A, Ivanova, A I, Koval, T V, Modebadze, G S, Sivin, D OVolume:
1393
Journal:
Journal of Physics: Conference Series
DOI:
10.1088/1742-6596/1393/1/012021
Date:
November, 2019
File:
PDF, 504 KB
2019