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Influence of gas discharge plasma on forming process and properties of complex films
Zhidik, Y S, Danilina, T I, Chistoedova, A A, Zhidik, E V, Bitner, L RVolume:
1393
Journal:
Journal of Physics: Conference Series
DOI:
10.1088/1742-6596/1393/1/012154
Date:
November, 2019
File:
PDF, 1.06 MB
2019