Visual sensing based ultra-high precision motion control...

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IEEE/ASME Transactions on Mechatronics 2020

Visual sensing based ultra-high precision motion control with compensated mechanical drift across different stages

Wang, Yuliang, Lian, Zhaoxin, Cui, Xiaomeng, Chen, Buyun, Li, Xiaolai, Li, Mao, Zeng, Binglin, Bi, Shusheng
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Year:
2020
Journal:
IEEE/ASME Transactions on Mechatronics
DOI:
10.1109/TMECH.2020.2975039
File:
PDF, 15.16 MB
2020
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