Fabrication of CMOS Invertors in Si Thin-Film-Transistors...

IEEE Journal of the Electron Devices Society 2020 Vol. 8

Fabrication of CMOS Invertors in Si Thin-Film-Transistors by Laser Doping Using a Chemical Solution Coating

Imokawa, Kaname, Kurashige, Takayuki, Suwa, Akira, Nakamura, Daisuke, Sadoh, Taizoh, Goto, Tetsuya, Ikenoue, Hiroshi
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Volume:
8
Year:
2020
Journal:
IEEE Journal of the Electron Devices Society
DOI:
10.1109/jeds.2019.2956991
File:
PDF, 3.04 MB
2020
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