[IEEE 2019 20th International Conference on Solid-State...

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[IEEE 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII) - Berlin, Germany (2019.6.23-2019.6.27)] 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII) - Self-Heated Thermoresistive Flow Sensor Coated with Parylene-C for Reliability Enhancement by Using 0.35µM CMOS MEMS Technology

Xu, Wei, Wang, Xiaoyi, Mousa, Basant, Paszkiewicz, Maria, Lee, Yi-Kuen
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Year:
2019
DOI:
10.1109/transducers.2019.8808379
File:
PDF, 4.09 MB
2019
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