Stability of hexafluoroacetylacetone molecules on metallic...

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films 2020 / 03 Vol. 38; Iss. 2

Stability of hexafluoroacetylacetone molecules on metallic and oxidized nickel surfaces in atomic-layer-etching processes

Basher, Abdulrahman H., Krstić, Marjan, Takeuchi, Takae, Isobe, Michiro, Ito, Tomoko, Kiuchi, Masato, Karahashi, Kazuhiro, Wenzel, Wolfgang, Hamaguchi, Satoshi
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
38
Journal:
Journal of Vacuum Science & Technology A
DOI:
10.1116/1.5127532
Date:
March, 2020
File:
PDF, 3.64 MB
2020
Conversion to is in progress
Conversion to is failed