Effect of Abrasive Nanoparticle Concentration on the...

Effect of Abrasive Nanoparticle Concentration on the Tribological, Thermal and Kinetic Attributes of Tungsten Chemical Mechanical Planarization

McAllister, Jeffrey, Mariscal, Juan Cristobal, Dadashazar, Hossein, Sampurno, Yasa, Philipossian, Ara
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Volume:
9
Journal:
ECS Journal of Solid State Science and Technology
DOI:
10.1149/2162-8777/ab6ff5
Date:
February, 2020
File:
PDF, 924 KB
2020
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