Effect of Abrasive Nanoparticle Concentration on the Tribological, Thermal and Kinetic Attributes of Tungsten Chemical Mechanical Planarization
McAllister, Jeffrey, Mariscal, Juan Cristobal, Dadashazar, Hossein, Sampurno, Yasa, Philipossian, AraVolume:
9
Journal:
ECS Journal of Solid State Science and Technology
DOI:
10.1149/2162-8777/ab6ff5
Date:
February, 2020
File:
PDF, 924 KB
2020