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Electrical and Optical Properties of Amorphous SnO2:Ta Films, Prepared by DC and RF Magnetron Sputtering: A Systematic Study of the Influence of the Type of the Reactive Gas
Mientus, Rainald, Weise, Michael, Seeger, Stefan, Heller, Rene, Ellmer, KlausVolume:
10
Journal:
Coatings
DOI:
10.3390/coatings10030204
Date:
February, 2020
File:
PDF, 822 KB
2020