Design and Fabrication of Microscale, Thin-Film Silicon...

Micromachines 2020 / 02 Vol. 11; Iss. 3

Design and Fabrication of Microscale, Thin-Film Silicon Solid Immersion Lenses for Mid-Infrared Application

Lee, Gil Ju, Kim, Hyun Myung, Song, Young Min
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Volume:
11
Journal:
Micromachines
DOI:
10.3390/mi11030250
Date:
February, 2020
File:
PDF, 2.97 MB
2020
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