Fabrication of 4H-SiC PiN diodes on substrate grown by HTCVD method
TOKUDA, Yuichiro, Uehigashi, Hideyuki, Murata, Koichi, TSUCHIDA, HidekazuJournal:
Japanese Journal of Applied Physics
DOI:
10.7567/1347-4065/ab6419
Date:
December, 2019
File:
PDF, 917 KB
2019