C12 Sub-surface damage layer evaluation of polished SiC...

The Proceedings of The Manufacturing & Machine Tool Conference 2012 Vol. 2012.9

C12 Sub-surface damage layer evaluation of polished SiC surface by RHEED

Koyama, Kouji, Takeda, Hidetoshi, Aida, Hideo, Nakata, Junya, Sugiyama, Takuhiro, Tosaka, Aki, Shigeta, Yukichi
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Volume:
2012.9
Year:
2012
Journal:
The Proceedings of The Manufacturing & Machine Tool Conference
DOI:
10.1299/jsmemmt.2012.9.149
File:
PDF, 506 KB
2012
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