Demonstration of Sputtering Atomic Layer Augmented...

ACS Applied Materials & Interfaces 2020 / 03

Demonstration of Sputtering Atomic Layer Augmented Deposition (SALAD): Aluminum Oxide-Copper Dielectric-Metal Nanocomposite Thin Films

Giraldo, Brian, Fryauf, David Mark, Cheney, Brandon, Sands, Jacob, Kobayashi, Nobuhiko Paul
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Journal:
ACS Applied Materials & Interfaces
DOI:
10.1021/acsami.9b18628
Date:
March, 2020
File:
PDF, 1.60 MB
2020
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