Determination of atomic oxygen state densities in a double inductively coupled plasma using optical emission and absorption spectroscopy and probe measurements
Fiebrandt, Marcel, Bibinov, Nikita, Awakowicz, PeterJournal:
Plasma Sources Science and Technology
DOI:
10.1088/1361-6595/ab7cbe
Date:
March, 2020
File:
PDF, 647 KB
2020