A Parallel Differential Confocal Method for Highly Precise...

IEEE Photonics Technology Letters 2020 / 4 Vol. 32; Iss. 7

A Parallel Differential Confocal Method for Highly Precise Surface Height Measurements

Yi, Dingrong, Liu, Zhiqun, Kong, Linghua, Zhu, Xingxing, Jiang, Wei
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Volume:
32
Journal:
IEEE Photonics Technology Letters
DOI:
10.1109/lpt.2020.2973649
Date:
April, 2020
File:
PDF, 1.23 MB
2020
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